Is a
Patent attributes
Current Assignee
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Rita Rooyackers0
Malgorzata Jurczak0
Nadine Collaert0
Date of Patent
February 24, 2009
0Patent Application Number
117674400
Date Filed
June 22, 2007
0Patent Primary Examiner
Patent abstract
A method is disclosed for relaxing strain in a multi-gate device, the method comprising providing a substrate with a strained material, patterning a plurality of fins in the strained material, defining a first region comprising at least one fin, defining a second region comprising at least one fin, providing a diffusion barrier layer on the first region, performing a hydrogen anneal such that the strain in the second region is relaxed.
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