US Patent 7495464 Inspection device of a semiconductor device

An inspection device of a semiconductor device includes a socket where the semiconductor device is installed, and a measuring part configured to inspect an electrical property of the semiconductor device. A standard sample and the socket are provided in a body. A standard value of the standard sample is stored in the measuring part. Whether there is abnormality of the measuring part is determined by comparing a value of the standard sample measured by the measuring part and the standard value.