US Patent 7507667 Selective heating using flash anneal
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Patent abstract
A copper film is treated by applying light at short wavelengths, e.g., at less than 0.6 μm, to heat the copper film and generate a large temperature gradient from the surface of the copper to the interface between the copper and underlying silicon. As a result, grain growth in the copper is enhanced.
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US Patent 07507667 Selective heating using flash anneal US Patent 7507667 Selective heating using flash anneal
Infobox
Patent Number
0750766700
Patent Number
750766700
Edits on 22 Apr, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
075076670
Date of Patent
March 24, 2009
0Patent Application Number
117444460
Date Filed
May 4, 2007
0Official Website
Patent Primary Examiner
Edits on 26 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
075076670
Date of Patent
March 24, 2009
0Patent Application Number
117444460
Date Filed
May 4, 2007
0Official Website
Patent Primary Examiner
Edits on 15 Jun, 2022
Golden AI
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US Patent 07507667 Selective heating using flash anneal
Infobox
Is a
Patent jurisdiction
Patent number
07507667
Date of patent
March 24, 2009
Patent application number
11744446
Date Filed
May 4, 2007
Patent primary examiner
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