Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chang Liu0
Jack Chen0
Jonathan Engel0
Date of Patent
March 31, 2009
0Patent Application Number
118801340
Date Filed
July 20, 2007
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A microfabricated pressure sensor. The pressure sensor comprises a raised diaphragm disposed on a substrate. The diaphragm is configured to bend in response to an applied pressure difference. A strain gauge of a conductive material is coupled to a surface of the raised diaphragm and to at least one of the substrate and a piece rigidly connected to the substrate.
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