US Patent 7509869 Microfabricated pressure and shear stress sensors
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Patent Inventor Names
Chang Liu0
Jack Chen0
Jonathan Engel0
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Patent abstract
A microfabricated pressure sensor. The pressure sensor comprises a raised diaphragm disposed on a substrate. The diaphragm is configured to bend in response to an applied pressure difference. A strain gauge of a conductive material is coupled to a surface of the raised diaphragm and to at least one of the substrate and a piece rigidly connected to the substrate.
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US Patent 07509869 Microfabricated pressure and shear stress sensors US Patent 7509869 Microfabricated pressure and shear stress sensors
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Patent Number
075098690
Patent Number
75098690
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Patent Jurisdiction
Patent Number
075098690
Date of Patent
March 31, 2009
0Patent Application Number
118801340
Date Filed
July 20, 2007
0Official Website
Patent Primary Examiner
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US Patent 07509869 Microfabricated pressure and shear stress sensors
Infobox
Is a
Patent jurisdiction
Patent number
07509869
Date of patent
March 31, 2009
Patent application number
11880134
Date Filed
July 20, 2007
Patent primary examiner
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