Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
April 14, 2009
Patent Application Number
11509638
Date Filed
August 25, 2006
Patent Primary Examiner
Patent abstract
There is provided a novel polyester compound having in its main polymer chain an aliphatic cyclic structure with carboxylic acids or carboxylic acid ester groups as represented by the chemical formula (1), a resist material containing the polyester compound and a patterning method using the resist material.
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