US Patent 7517635 Polyester compound and resist material using the same
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Patent abstract
There is provided a novel polyester compound having in its main polymer chain an aliphatic cyclic structure with carboxylic acids or carboxylic acid ester groups as represented by the chemical formula (1), a resist material containing the polyester compound and a patterning method using the resist material.
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US Patent 07517635 Polyester compound and resist material using the same US Patent 7517635 Polyester compound and resist material using the same
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Patent Number
0751763500
Patent Number
751763500
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Official Website
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Infobox
Is a
Patent Jurisdiction
Patent Number
075176350
Date of Patent
April 14, 2009
0Patent Application Number
115096380
Date Filed
August 25, 2006
0Official Website
Patent Primary Examiner
Edits on 26 Sep, 2022
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Infobox
Is a
Patent Jurisdiction
Patent Number
075176350
Date of Patent
April 14, 2009
0Patent Application Number
115096380
Date Filed
August 25, 2006
0Official Website
Patent Primary Examiner
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US Patent 07517635 Polyester compound and resist material using the same
Infobox
Is a
Patent jurisdiction
Patent number
07517635
Date of patent
April 14, 2009
Patent application number
11509638
Date Filed
August 25, 2006
Patent primary examiner
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