Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Keiji Emoto0
Date of Patent
April 14, 2009
0Patent Application Number
119255790
Date Filed
October 26, 2007
0Patent Primary Examiner
Patent abstract
In a liquid-immersion exposure method and a liquid-immersion exposure apparatus, on the basis of a liquid repellency distribution at a surface which an immersion liquid contacts as a result of a movement of a stage, a path where a movement time of the stage becomes the shortest is calculated, so that the stage is moved along this path.
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