US Patent 7518708 Liquid-immersion exposure method and liquid-immersion exposure apparatus
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Patent Inventor Names
Keiji Emoto0
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Patent abstract
In a liquid-immersion exposure method and a liquid-immersion exposure apparatus, on the basis of a liquid repellency distribution at a surface which an immersion liquid contacts as a result of a movement of a stage, a path where a movement time of the stage becomes the shortest is calculated, so that the stage is moved along this path.
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US Patent 07518708 Liquid-immersion exposure method and liquid-immersion exposure apparatus US Patent 7518708 Liquid-immersion exposure method and liquid-immersion exposure apparatus
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Patent Number
075187080
Patent Number
75187080
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Patent Jurisdiction
Patent Number
075187080
Date of Patent
April 14, 2009
0Patent Application Number
119255790
Date Filed
October 26, 2007
0Official Website
Patent Primary Examiner
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US Patent 07518708 Liquid-immersion exposure method and liquid-immersion exposure apparatus
Infobox
Is a
Patent jurisdiction
Patent number
07518708
Date of patent
April 14, 2009
Patent application number
11925579
Date Filed
October 26, 2007
Patent primary examiner
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