US Patent 7524383 Method and system for passivating a processing chamber

Patent 7524383 was granted and assigned to Tokyo Electron on April, 2009 by the United States Patent and Trademark Office.

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Patent

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Current Assignee

Tokyo Electron

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7524383

Date of Patent

April 28, 2009

Patent Application Number

11137155

Date Filed

May 25, 2005

Patent Primary Examiner

Roy King

Patent abstract

A method and system for passivating a processing chamber is provided, whereby the processing chamber is exposed to one or more cycles of citric acid, or nitric acid. The processing chamber is fabricated, for example, from stainless steel. Each cycle may be performed at a pressure greater than atmospheric pressure, or a temperature greater than 20 degrees centigrade, or both.

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