US Patent 7524383 Method and system for passivating a processing chamber
Patent 7524383 was granted and assigned to Tokyo Electron on April, 2009 by the United States Patent and Trademark Office.
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Patent abstract
A method and system for passivating a processing chamber is provided, whereby the processing chamber is exposed to one or more cycles of citric acid, or nitric acid. The processing chamber is fabricated, for example, from stainless steel. Each cycle may be performed at a pressure greater than atmospheric pressure, or a temperature greater than 20 degrees centigrade, or both.
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US Patent 07524383 Method and system for passivating a processing chamber US Patent 7524383 Method and system for passivating a processing chamber
Infobox
Patent Number
0752438300
Patent Number
752438300
Edits on 22 Apr, 2023
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
075243830
Date of Patent
April 28, 2009
0Patent Application Number
111371550
Date Filed
May 25, 2005
0Official Website
Patent Primary Examiner
Edits on 26 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
075243830
Date of Patent
April 28, 2009
0Patent Application Number
111371550
Date Filed
May 25, 2005
0Official Website
Patent Primary Examiner
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US Patent 07524383 Method and system for passivating a processing chamber
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07524383
Date of patent
April 28, 2009
Patent application number
11137155
Date Filed
May 25, 2005
Patent primary examiner
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