Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
April 28, 2009
Patent Application Number
12076489
Date Filed
March 19, 2008
Patent Primary Examiner
Patent abstract
A rotatable contamination barrier for use with an extreme ultraviolet radiation system includes a blade structure configured to trap contaminant material coming from a radiation source, and an eccentric mass element displaced relative to a central axis of rotation to balance the blade structure when the blade structure is rotated about the central axis.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
