US Patent 7525635 Contamination barrier and lithographic apparatus
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Patent abstract
A rotatable contamination barrier for use with an extreme ultraviolet radiation system includes a blade structure configured to trap contaminant material coming from a radiation source, and an eccentric mass element displaced relative to a central axis of rotation to balance the blade structure when the blade structure is rotated about the central axis.
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US Patent 07525635 Contamination barrier and lithographic apparatus US Patent 7525635 Contamination barrier and lithographic apparatus
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Patent Number
0752563500
Patent Number
752563500
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Is a
Patent Jurisdiction
Patent Number
075256350
Date of Patent
April 28, 2009
0Patent Application Number
120764890
Date Filed
March 19, 2008
0Official Website
Patent Primary Examiner
Edits on 27 Sep, 2022
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Infobox
Is a
Patent Jurisdiction
Patent Number
075256350
Date of Patent
April 28, 2009
0Patent Application Number
120764890
Date Filed
March 19, 2008
0Official Website
Patent Primary Examiner
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US Patent 07525635 Contamination barrier and lithographic apparatus
Infobox
Is a
Patent jurisdiction
Patent number
07525635
Date of patent
April 28, 2009
Patent application number
12076489
Date Filed
March 19, 2008
Patent primary examiner
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