Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ikunao Isomura0
Toru Tojo0
Date of Patent
April 28, 2009
Patent Application Number
10720136
Date Filed
November 25, 2003
Patent Citations Received
Patent Primary Examiner
Patent abstract
With a pattern inspection apparatus, image data corresponding to all patterns on an inspection target plate can be generated on the basis of scanned pattern data obtained with low-magnification optics different from ordinary inspection optics, or design pattern data. A pattern repeated area can be automatically detected from the image data. Therefore, die-to-die comparative inspection can be performed if the operator does not specify which dies to inspect. Thus, the inspection throughput can be improved.
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