Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Steven M. Zuniga0
Thomas H. Osterheld0
Date of Patent
May 19, 2009
Patent Application Number
10826185
Date Filed
April 15, 2004
Patent Citations Received
Patent Primary Examiner
Patent abstract
A substrate is maintained beneath a substrate mounting surface with a retaining ring that includes a generally annular lower portion having a bottom surface for contacting the polishing surface during polishing, and a generally annular upper portion having a bottom surface joined to the lower portion and a top surface fixed to and abutting the base. The lower portion is made of a plastic and the upper lower portion is made of a metal which is more rigid than the plastic.
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