US Patent 7534364 Methods for a multilayer retaining ring
Patent 7534364 was granted and assigned to Applied Materials on May, 2009 by the United States Patent and Trademark Office.
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Patent Inventor Names
Steven M. Zuniga0
Thomas H. Osterheld0
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Patent abstract
A substrate is maintained beneath a substrate mounting surface with a retaining ring that includes a generally annular lower portion having a bottom surface for contacting the polishing surface during polishing, and a generally annular upper portion having a bottom surface joined to the lower portion and a top surface fixed to and abutting the base. The lower portion is made of a plastic and the upper lower portion is made of a metal which is more rigid than the plastic.
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US Patent 07534364 Methods for a multilayer retaining ring US Patent 7534364 Methods for a multilayer retaining ring
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Patent Number
07534364
Patent Number
7534364
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Official Website
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US Patent 07534364 Methods for a multilayer retaining ring
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Is a
Current assignee
Patent jurisdiction
Patent number
07534364
Date of patent
May 19, 2009
Patent application number
10826185
Date Filed
April 15, 2004
Patent primary examiner
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