Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
May 19, 2009
Patent Application Number
11708033
Date Filed
February 20, 2007
Patent Primary Examiner
Patent abstract
As an oxygen diffusion prevention layer, a multilayer film formed by a metal nitride and a noble metal element. As an interlayer insulation film on the oxygen diffusion prevention layer, a plasma CVD oxide film is used. Moreover, as an interlayer insulation film on a capacitor, an ozone TEOS film is used.
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