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US Patent 7535578 Lithographic apparatus and interferometer system

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Patent Citations Received
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US Patent 11992337 Wearable self-mixing interferometry device used to sense physiological conditions
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US Patent 11861072 Self-mixing interferometry-based input device
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Patent Inventor Names
Wouter Onno Pril0
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Patent abstract

A lithographic apparatus is presented that includes a substrate holder configured to hold a substrate, an illuminator configured to condition a beam of radiation, a support structure configured to support a patterning device that imparts a desired pattern to the beam of radiation, a projection system that projects the patterned beam onto a target portion of the substrate, and an interferometer system configured to measure a position of the object to assist in positioning the object.

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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=075355780
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US Patent 07535578 Lithographic apparatus and interferometer system US Patent 7535578 Lithographic apparatus and interferometer system

Infobox
Patent Number
075355780
Patent Number
75355780
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Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
075355780
Date of Patent
May 19, 2009
0
Patent Application Number
108994370
Date Filed
July 27, 2004
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=075355780
Patent Primary Examiner
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Tarifur Chowdhury
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https://pdfpiw.uspto.gov/.piw?Docid=07535578
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 US Patent 07535578 Lithographic apparatus and interferometer system

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07535578
Date of patent
May 19, 2009
Patent application number
10899437
Date Filed
July 27, 2004
Patent primary examiner
‌
Tarifur Chowdhury

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