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Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Noboru Moriya0
Yoshihiko Togawa0
Tsuyoshi Matsuda0
Ken Harada0
Tetsuya Akashi0
Date of Patent
May 26, 2009
Patent Application Number
10585359
Date Filed
January 7, 2005
Patent Primary Examiner
Patent abstract
The present invention provides a technique enabling to control fringe spacing s and an interference width W independently of each other, which are important parameters for an interferometer using an electron biprism.
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