Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
S. M. Reza Sadjadi0
Nicolas Bright0
Date of Patent
May 26, 2009
Patent Application Number
11126708
Date Filed
May 10, 2005
Patent Citations Received
Patent Primary Examiner
Patent abstract
An apparatus comprising computer readable media is provided. The computer readable media comprises computer readable code for receiving a feature layout and computer readable code for applying shrink correction on the feature layout. The computer readable code for applying the shrink correction comprises providing corner cutouts, adjusting line width and length, shape modifications, etc. for forming features in a patterned layer.
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