Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 2, 2009
Patent Application Number
11714846
Date Filed
March 7, 2007
Patent Primary Examiner
Patent abstract
A CMP pad conditioner is provided with a grinding part formed by fixing abrasive grains on a metal base by soldering, wherein the grinding part has a flat part near an inner periphery and an inclined part near an outer periphery, wherein abrasive grains having regular shapes are fixed to the flat part, and wherein abrasive grains having acute shapes are fixed to the inclined part.
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