US Patent 7540802 CMP pad conditioner
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Patent abstract
A CMP pad conditioner is provided with a grinding part formed by fixing abrasive grains on a metal base by soldering, wherein the grinding part has a flat part near an inner periphery and an inclined part near an outer periphery, wherein abrasive grains having regular shapes are fixed to the flat part, and wherein abrasive grains having acute shapes are fixed to the inclined part.
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US Patent 07540802 CMP pad conditioner US Patent 7540802 CMP pad conditioner
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Patent Number
0754080200
Patent Number
754080200
Edits on 18 May, 2023
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Official Website
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Infobox
Is a
Patent Jurisdiction
Patent Number
075408020
Date of Patent
June 2, 2009
0Patent Application Number
117148460
Date Filed
March 7, 2007
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
075408020
Date of Patent
June 2, 2009
0Patent Application Number
117148460
Date Filed
March 7, 2007
0Official Website
Patent Primary Examiner
Edits on 15 Jun, 2022
Golden AI
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US Patent 07540802 CMP pad conditioner
Infobox
Is a
Patent jurisdiction
Patent number
07540802
Date of patent
June 2, 2009
Patent application number
11714846
Date Filed
March 7, 2007
Patent primary examiner
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