Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Steven J. Holmes0
Katherina E. Babich0
Richard Stephan Wise0
Scott D. Allen0
Arpan P. Mahorowala0
Dirk Pfeiffer0
Date of Patent
June 9, 2009
Patent Application Number
11337411
Date Filed
January 23, 2006
Patent Primary Examiner
Patent abstract
Techniques for semiconductor processing are provided. In one aspect, a method for patterning one or more features in a semiconductor device comprises the following step. At least one critical dimension of the one or more features is reduced during etching of the antireflective material. A lithographic structure is also provided.
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