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US Patent 7545843 Ultra-high Q micro-resonator and method of fabrication

Patent 7545843 was granted and assigned to California Institute of Technology on June, 2009 by the United States Patent and Trademark Office.

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Patent abstract

A micro-cavity resonator including a micro-cavity capable of high and ultra-high Q values and a silicon substrate. Portions of the silicon substrate located below a periphery of the micro-cavity are removed to form a pillar, which supports the micro-cavity. Optical energy travels along an inner surface of the micro-cavity.

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