US Patent 7545843 Ultra-high Q micro-resonator and method of fabrication
Patent 7545843 was granted and assigned to California Institute of Technology on June, 2009 by the United States Patent and Trademark Office.
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Patent Inventor Names
Deniz K. Armani0
Kerry J. Vahala0
Sean M. Spillane0
Tobias J. Kippenberg0
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Patent abstract
A micro-cavity resonator including a micro-cavity capable of high and ultra-high Q values and a silicon substrate. Portions of the silicon substrate located below a periphery of the micro-cavity are removed to form a pillar, which supports the micro-cavity. Optical energy travels along an inner surface of the micro-cavity.
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US Patent 07545843 Ultra-high Q micro-resonator and method of fabrication US Patent 7545843 Ultra-high Q micro-resonator and method of fabrication
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Patent Number
075458430
Patent Number
75458430
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Current Assignee
Patent Jurisdiction
Patent Number
075458430
Date of Patent
June 9, 2009
0Patent Application Number
106783540
Date Filed
October 2, 2003
0Official Website
Patent Primary Examiner
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US Patent 07545843 Ultra-high Q micro-resonator and method of fabrication
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07545843
Date of patent
June 9, 2009
Patent application number
10678354
Date Filed
October 2, 2003
Patent primary examiner
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