US Patent 7547636 Pulsed ultra-high aspect ratio dielectric etch
Patent 7547636 was granted and assigned to Lam Research on June, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 5, 2007
0
Date of Patent
June 16, 2009
0
Patent Application Number
11671342
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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