Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hannu Huotari0
Suvi Haukka0
Date of Patent
July 21, 2009
0Patent Application Number
112948430
Date Filed
December 5, 2005
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A process for producing metal nitride thin films comprising doping the metal nitride thin films by atomic layer deposition (ALD) with silicon or boron or a combination thereof. The work function of metal nitride thin films, which are used in metal electrode applications, can efficiently be tuned.
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