US Patent 7584761 Wafer edge surface treatment with liquid meniscus
Patent 7584761 was granted and assigned to Lam Research on September, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 2, 2005
Date of Patent
September 8, 2009
Patent Application Number
11292465
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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