Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Christopher T Lane0
Steven Verhaverbeke0
Sasson R Somekh0
J Kelly Truman0
Date of Patent
September 8, 2009
0Patent Application Number
119780040
Date Filed
October 26, 2007
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A method of a single wafer wet/dry cleaning apparatus comprising:a transfer chamber having a wafer handler contained therein;a first single wafer wet cleaning chamber directly coupled to the transfer chamber; anda first single wafer ashing chamber directly coupled to the transfer chamber.
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