Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Steven M. McMonigal0
Date of Patent
October 6, 2009
0Patent Application Number
115576610
Date Filed
November 8, 2006
0Patent Primary Examiner
Patent abstract
A pressure sensor housing and configuration is provided for a single-square-sensor (SSS) sensing die. A sensor includes a glass wafer hermetically bonded to the SSS chip. The SSS chip is then positioned between a header and a cover, which can be glued together using an epoxy, for example. A tube, such as a pyrex tube, is connected to the SSS chip through which pressure is sensed. After bonding the wafer to the SSS chip, a vacuum seal is created and thus less emphasis is placed on hermetically sealing the remainder of the sensor.
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