Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tsunehiro Nishi0
Seiichiro Tachibana0
Takeru Watanabe0
Date of Patent
October 6, 2009
Patent Application Number
11155605
Date Filed
June 20, 2005
Patent Primary Examiner
Patent abstract
A (meth)acrylic copolymer is endowed with a good profile of rigidity and hydrophilicity by introducing not only polycyclic structure units, but also recurring units having a high polarity. A chemically amplified positive resist composition comprising the polymer has a high sensitivity, resolution and etch resistance and improved substrate adhesion and developer affinity.
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