Is a
Patent attributes
Current Assignee
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kishor Purushottam Gadkaree0
Richard Orr Maschmeyer0
Jeffrey Scott Cites0
Date of Patent
October 27, 2009
0Patent Application Number
114447410
Date Filed
May 31, 2006
0Patent Primary Examiner
Patent abstract
Disclosed are methods for making SOI and SOG structures using purified ion shower for implanting ions to the donor substrate. The purified ion shower provides expedient, efficient, low-cost and effective ion implantation while minimizing damage to the exfoliation film.
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