Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kai-Erik Elers0
Date of Patent
November 3, 2009
Patent Application Number
11591845
Date Filed
November 1, 2006
Patent Citations Received
Patent Primary Examiner
Patent abstract
Methods of forming metal carbide thin films are provided. According to preferred embodiments, metal carbide thin films are formed in an atomic layer deposition (ALD) process by alternately and sequentially contacting a substrate in a reaction space with spatially and temporally separated vapor phase pulses of a metal source chemical, a reducing agent and a carbon source chemical. The reducing agent is preferably selected from the group consisting of excited species of hydrogen and silicon-containing compounds.
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