Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
November 10, 2009
Patent Application Number
11396245
Date Filed
March 31, 2006
Patent Primary Examiner
Patent abstract
This invention provides a precursor film stack for use in the production of MEMS devices. The precursor film stack comprises a carrier substrate, a first layer formed on the carrier substrate, a second layer of an insulator material formed on the first layer, and a third layer of a sacrificial material formed on the second layer.
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