US Patent 7616369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices
All edits
Edits on 16 Sep, 2023
Golden AI
Edits made to:
Article (+346 characters)
Article
Patent abstract
This invention provides a precursor film stack for use in the production of MEMS devices. The precursor film stack comprises a carrier substrate, a first layer formed on the carrier substrate, a second layer of an insulator material formed on the first layer, and a third layer of a sacrificial material formed on the second layer.
Edits on 21 Jul, 2023
Golden AI
Edits made to:
Infobox (-1 properties)
Infobox
Official Website
Edits on 18 May, 2023
Golden AI
Edits made to:
Infobox (+1/-1 properties)
US Patent 07616369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices US Patent 7616369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices
Infobox
Patent Number
0761636900
Patent Number
761636900
Edits on 22 Mar, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
076163690
Date of Patent
November 10, 2009
0Patent Application Number
113962450
Date Filed
March 31, 2006
0Official Website
Patent Primary Examiner
Edits on 24 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
076163690
Date of Patent
November 10, 2009
0Patent Application Number
113962450
Date Filed
March 31, 2006
0Official Website
Patent Primary Examiner
Edits on 18 Jun, 2022
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Website URL
Edits on 3 Dec, 2021
Golden AI
Edits made to:
Infobox (+7 properties)
US Patent 07616369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices
Infobox
Is a
Patent jurisdiction
Patent number
07616369
Date of patent
November 10, 2009
Patent application number
11396245
Date Filed
March 31, 2006
Patent primary examiner
Find more entities like US Patent 7616369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
