Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Erel Milshtein0
Date of Patent
November 17, 2009
Patent Application Number
10342566
Date Filed
January 14, 2003
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method for optical inspection of a surface includes selecting an apodization scheme in response to a characteristic of the surface, and applying an apodizer to apodize a beam of radiation in response to the selected apodization scheme. The apodized beam of radiation is directed to impinge on the surface, whereby a plurality of rays are scattered from the surface, and at least one of the scattered rays is detected, typically in order to detect a defect on the surface.
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