Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yuval Lubashevsky0
Elad Farchi0
Yevgeniy Men0
Alon Alexander Volfman0
Itay Gdor0
Daria Negri0
Date of Patent
October 1, 2024
0Patent Application Number
175843350
Date Filed
January 25, 2022
0Patent Citations
...
Patent Primary Examiner
Patent abstract
Metrology is performed on a semiconductor wafer using a system with an apodizer. A spot is formed on the semiconductor wafer with a diameter from 2 nm to 5 nm. The associated beam of light has a wavelength from 400 nm to 800 nm. Small target measurement can be performed at a range of optical wavelengths.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
