US Patent 12105431 Annular apodizer for small target overlay measurement
All edits
Edits on 3 Oct, 2024
Golden AI
Edits made to:
Infobox (+63 properties)
Article (+320 characters)
US Patent 12105431 Annular apodizer for small target overlay measurement
Article
Patent abstract
Metrology is performed on a semiconductor wafer using a system with an apodizer. A spot is formed on the semiconductor wafer with a diameter from 2 nm to 5 nm. The associated beam of light has a wavelength from 400 nm to 800 nm. Small target measurement can be performed at a range of optical wavelengths.
Infobox
Is a
Patent Jurisdiction
Patent Number
Patent Inventor Names
Alon Alexander Volfman0
Daria Negri0
Elad Farchi0
Itay Gdor0
Yevgeniy Men0
Yuval Lubashevsky0
Date of Patent
October 1, 2024
0Patent Application Number
175843350
Date Filed
January 25, 2022
0Patent Citations
Patent Primary Examiner
CPC Code
Find more entities like US Patent 12105431 Annular apodizer for small target overlay measurement
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
