Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Iraj Sadighi0
Gary Wyka0
Jeff Hudgens0
Michael Rice0
Date of Patent
December 1, 2009
0Patent Application Number
116170350
Date Filed
December 28, 2006
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is positioned on the robot and is adapted to obtain image data of the calibration wafer disposed in a predefined location within the processing system. The image data is utilized to calibrate the robots motion.
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