US Patent 7627395 Vision system

Patent 7627395 was granted and assigned to Applied Materials on December, 2009 by the United States Patent and Trademark Office.

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Patent Citations Received

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US Patent 11984340 Teaching method

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Patent Inventor Names

Gary Wyka0

Iraj Sadighi0

Jeff Hudgens0

Michael Rice0

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Patent abstract

A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is positioned on the robot and is adapted to obtain image data of the calibration wafer disposed in a predefined location within the processing system. The image data is utilized to calibrate the robots motion.

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Official Website

https://pdfpiw.uspto.gov/.piw?Docid=076273950

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