Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Richard H. Lane0
Date of Patent
December 8, 2009
0Patent Application Number
099893720
Date Filed
November 21, 2001
0Patent Primary Examiner
Patent abstract
An electropolishing process for high resolution patterning of noble metals, such as platinum, for forming various semiconductor devices, such as capacitors or wiring patterns is disclosed.
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