US Patent 7632356 Gas providing member and processing device

Patent 7632356 was granted and assigned to NGK Insulators on December, 2009 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

NGK Insulators

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7632356

Patent Inventor Names

Yutaka Unno0

Yasumitsu Tomita0

Date of Patent

December 15, 2009

Patent Application Number

11374529

Date Filed

March 13, 2006

Patent Primary Examiner

‌

Parviz Hassanzadeh

Patent abstract

A gas providing member includes a body portion which forms a gas providing passage between the body portion and a processing member which holds the processing target, and the gas providing passage provides gas onto a processing target. In the body portion, a gas reservoir portion located in the gas providing passage is formed.

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