US Patent 7632356 Gas providing member and processing device
Patent 7632356 was granted and assigned to NGK Insulators on December, 2009 by the United States Patent and Trademark Office.
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Patent Inventor Names
Yasumitsu Tomita0
Yutaka Unno0
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Patent abstract
A gas providing member includes a body portion which forms a gas providing passage between the body portion and a processing member which holds the processing target, and the gas providing passage provides gas onto a processing target. In the body portion, a gas reservoir portion located in the gas providing passage is formed.
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US Patent 07632356 Gas providing member and processing device US Patent 7632356 Gas providing member and processing device
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Patent Number
07632356
Patent Number
7632356
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Official Website
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US Patent 07632356 Gas providing member and processing device
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Is a
Current assignee
Patent jurisdiction
Patent number
07632356
Date of patent
December 15, 2009
Patent application number
11374529
Date Filed
March 13, 2006
Patent primary examiner
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