Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Zhaohui Cheng0
Natsuki Tsuno0
Takashi Furukawa0
Date of Patent
December 15, 2009
0Patent Application Number
120629400
Date Filed
April 4, 2008
0Patent Primary Examiner
Patent abstract
Efficiency of a charging processing of an insulator sample is improved. And, an electron optical system is adjusted according to a contact resistance value of the insulator sample. Breakdown of a sample is performed before the charging processing, and then, the charging processing is performed. A control parameter of the electron optical system is selected using a result of a resistance value of the sample for checking the breakdown.
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