US Patent 7635502 ALD apparatus and method
Patent 7635502 was granted and assigned to Sundew Technologies on December, 2009 by the United States Patent and Trademark Office.
All edits
Edits on 17 Sep, 2023
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Patent Inventor Names
Ofer Sneh0
Edits on 16 Sep, 2023
Golden AI
Edits made to:
Article (+223 characters)
Article
Patent abstract
An apparatus and method for atomic layer deposition with improved efficiency of both chemical dose and purge is presented. The apparatus includes an integrated equipment and procedure for chamber maintenance.
Edits on 20 May, 2023
Golden AI
Edits made to:
Infobox (-1 properties)
Infobox
Official Website
Edits on 19 May, 2023
Golden AI
Edits made to:
Infobox (+1/-1 properties)
US Patent 07635502 ALD apparatus and method US Patent 7635502 ALD apparatus and method
Infobox
Patent Number
076355020
Patent Number
76355020
Edits on 25 Sep, 2022
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
076355020
Date of Patent
December 22, 2009
0Patent Application Number
110767720
Date Filed
March 10, 2005
0Official Website
Patent Primary Examiner
Edits on 18 Jun, 2022
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Website URL
Edits on 3 Dec, 2021
Golden AI
Edits made to:
Infobox (+8 properties)
US Patent 07635502 ALD apparatus and method
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07635502
Date of patent
December 22, 2009
Patent application number
11076772
Date Filed
March 10, 2005
Patent primary examiner
Find more entities like US Patent 7635502 ALD apparatus and method
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
