US Patent 7635502 ALD apparatus and method
Patent 7635502 was granted and assigned to Sundew Technologies on December, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 10, 2005
0
Date of Patent
December 22, 2009
0
Patent Application Number
11076772
0
Patent Inventor Names
Ofer Sneh
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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