US Patent 7642205 Rapid thermal processing using energy transfer layers
Patent 7642205 was granted and assigned to Mattson Technology on January, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 8, 2005
Date of Patent
January 5, 2010
Patent Application Number
11102496
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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