Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Nicolas Hotellier0
Christophe Aumont0
Cyril Fellous0
François Roy0
Date of Patent
February 16, 2010
0Patent Application Number
117069280
Date Filed
February 14, 2007
0Patent Primary Examiner
Patent abstract
A photodetector including a photodiode formed in a semiconductor substrate and a waveguide element formed of a block of a high-index material extending above the photodiode in a thick layer of a dielectric superposed to the substrate, the thick layer being at least as a majority formed of silicon oxide and the block being formed of a polymer of the general formula R1R2R3SiOSiR1R2R3 where R1, R2, and R3 are any carbonaceous or metal substituents and where one of R1, R2, or R3 is a carbonaceous substituent having at least four carbon atoms and/or at least one oxygen atom.
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