US Patent 7663386 Probe card

Patent 7663386 was granted and assigned to Tokyo Electron on February, 2010 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Tokyo Electron

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7663386

Date of Patent

February 16, 2010

Patent Application Number

10586651

Date Filed

January 20, 2005

Patent Citations Received

‌

US Patent 11943886 Electronic assembly including a compression assembly for cable connector modules

Patent Primary Examiner

‌

Ha Tran T Nguyen

Patent abstract

It is an object of the present invention to realize sure electrical connection between a contactor and an object to be inspected without influenced by heat, a reduction in the pre-heating time, and an enhanced throughput.

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