US Patent 7663386 Probe card
Patent 7663386 was granted and assigned to Tokyo Electron on February, 2010 by the United States Patent and Trademark Office.
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Patent abstract
It is an object of the present invention to realize sure electrical connection between a contactor and an object to be inspected without influenced by heat, a reduction in the pre-heating time, and an enhanced throughput.
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US Patent 07663386 Probe card US Patent 7663386 Probe card
Infobox
Patent Number
0766338600
Patent Number
766338600
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
076633860
Date of Patent
February 16, 2010
0Patent Application Number
105866510
Date Filed
January 20, 2005
0Official Website
Patent Primary Examiner
Edits on 27 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
076633860
Date of Patent
February 16, 2010
0Patent Application Number
105866510
Date Filed
January 20, 2005
0Official Website
Patent Primary Examiner
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US Patent 07663386 Probe card
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07663386
Date of patent
February 16, 2010
Patent application number
10586651
Date Filed
January 20, 2005
Patent primary examiner
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